Piezoelectric thin film resonator, filter, and communication apparatus
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United States of America Patent
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Dec 27, 2011
Grant Date -
Mar 11, 2010
app pub date -
Mar 4, 2009
filing date -
Mar 6, 2008
priority date (Note) -
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Abstract
A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an upper electrode formed on the piezoelectric film. The upper electrode has a main portion and an extended portion connected to the main portion, the main portion opposing the lower electrode and an opening disposed between the substrate and the lower electrode, the extended portion having a portion which opposes the opening and the substrate.
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