Evaporative system for solar cell fabrication
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United States of America Patent
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Jan 3, 2012
Grant Date -
May 5, 2011
app pub date -
Oct 30, 2009
filing date -
Oct 30, 2009
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate positioned in the chamber is coated from a plurality of the evaporators, such that by controlling the operation of each evaporator independently the formation of the layers and the concentration gradient of each layer can be precisely controlled.
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