Substrate supporting apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 3, 2012
Grant Date -
Feb 12, 2009
app pub date -
Aug 8, 2008
filing date -
Aug 8, 2007
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate supporting apparatus includes first and second shafts spaced by a distance that corresponds to or exceeds a width of a substrate, and at least one wire to support the substrate. The wire has ends coupled to respective ones of the first and second shafts. The wire is raised and lowered to place a substrate onto a lower electrode in a substrate processing chamber and to remove the substrate when processing is completed.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully