Method for defect diagnosis and management
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United States of America Patent
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Jan 10, 2012
Grant Date -
Jul 15, 2010
app pub date -
Jan 14, 2009
filing date -
Jan 14, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
A method for defect diagnosis and management, which is implemented in a process for fabricating an article, comprising the following steps: obtaining an inspection image of the article, wherein the inspection image shows at least one defect of the article; retrieving a design layout corresponding to the inspection image, wherein the design layout has a plurality of conductive regions; matching the inspection image and the design layout for correcting the coordinates of the defect on the design layout; and judging the overlaps of the conductive regions so as to obtain a short failure if the defect covers two conductive regions, obtain a open failure if the defect intercepts one of conductive region, or obtain no failure if the defect overlaps one of conductive region but not intercepts or covers another conductive region.
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