Sintered fiber filter
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United States of America Patent
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Jan 17, 2012
Grant Date -
Jul 2, 2009
app pub date -
Oct 22, 2008
filing date -
Oct 24, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Sintered fiber filters are provided that can afford high particle capture efficiency and/or low pressure drop during operation, and are useful in applications such as semiconductor processing. The shape of at least a portion of the individual fibers (e.g., metal fibers) used to make the filter have a three-dimensional aspect, which allows for a low packing density and high porosity filtration media. Certain filters have a cylindrical or tube-like shape with tapered ends of higher density. Methods of making such filters, for example, using axial pressing, are also described.
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