Electromechanical system having a dielectric movable membrane
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United States of America Patent
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Jan 17, 2012
Grant Date -
Jun 9, 2011
app pub date -
Feb 11, 2011
filing date -
May 9, 2007
priority date (Note) -
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Abstract
An electromechanical device includes a partially reflective and partially transmissive layer and a movable functional element. The movable functional element includes a patterned flexible dielectric layer and a reflective layer mechanically coupled to the flexible dielectric layer. The patterned flexible dielectric layer is configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer. The reflective layer is situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.
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