Thin film tuning-fork type inflection resonator and electric signal processing element
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United States of America Patent
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Jan 24, 2012
Grant Date -
Jun 23, 2011
app pub date -
Feb 28, 2011
filing date -
Feb 6, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.
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