Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer

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Jan 31, 2012
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Jun 5, 2008
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Feb 14, 2008
filing date
May 5, 1994

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Expired

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Improvements in an interferometric modulator that cavity defined by two walls.

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SNAPTRACK, INC.

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Inventor Name	Address	# of filed Patents	Total Citations
Miles, Mark W	Boston, US	140	17380

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Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12031603

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PATENT NO	8105496
APP PUB NO	20080130089A1
SERIAL NO	12031603
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 31, 2012	US,8105496,B2 US8105496B2	GRANTED PATENT AS SECOND PUBLICATION
June 05, 2008	US,20080130089,A1 US20080130089A1	FIRST PUBLISHED PATENT APPLICATION

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