Method of manufacturing a process chamber component having yttrium-aluminum coating

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Feb 7, 2012
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May 15, 2008
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Oct 31, 2007
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Jan 8, 2002

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Abstract

A method of manufacturing a substrate processing chamber component comprises forming a chamber component comprising a metal alloy comprising yttrium and aluminum, and anodizing an exposed surface of the metal alloy.

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APPLIED MATERIALS INC	3050 BOWERS AVENUE SANTA CLARA CA 95054

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C25D:PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC ....

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Inventor Name	Address	# of filed Patents	Total Citations
Han, Nianci	San Jose, US	19	1749
Shih, Hong	Walnut, US	107	3985
Xu, Li	San Jose, US	397	7618

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Method of manufacturing a process chamber component having yttrium-aluminum coating

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United States of America Patent

11982039

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PATENT NO	8110086
APP PUB NO	20080110760A1
SERIAL NO	11982039
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
February 07, 2012	US,8110086,B2 US8110086B2	GRANTED PATENT AS SECOND PUBLICATION
May 15, 2008	US,20080110760,A1 US20080110760A1	FIRST PUBLISHED PATENT APPLICATION

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11982039

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