Multi-structure thermally trimmable resistors
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United States of America Patent
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Feb 7, 2012
Grant Date -
Mar 25, 2010
app pub date -
Feb 6, 2008
filing date -
Feb 6, 2007
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Abstract
A method for arranging a plurality of thermally isolated microstructures over at least one cavity, each of the microstructures housing at least part of a thermally-trimmable resistor, the thermally-trimmable resistor having at least a functional resistor, the method comprising: providing pairs of facing microstructures; grouping together sets of pairs of facing microstructures, each of the sets having at least one pair of facing microstructures; and arranging microstructures within a given set to have each microstructure exposed to heat from a same number of facing, side, and diagonal neighbors of microstructures from a same resistor.
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