US Patent No: 8,111,445

Number of patents in Portfolio can not be more than 2000

Spatial light modulator with integrated optical compensation structure

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ALSO PUBLISHED AS: 20080112039
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.

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First Claim

Related Publications

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 269 4460
Cummings, William J Millbrae, CA 176 2671
Sampsell, Jeffrey B San Jose, CA 220 12041
Tung, Ming-Hau San Francisco, CA 112 1558

Cited Art

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (162)
5,835,255 Visible spectrum modulator arrays 460 1994
6,040,937 Interferometric modulation 573 1996
5,986,796 Visible spectrum modulator arrays 446 1996
6,674,562 Interferometric modulation of radiation 596 1998
6,055,090 Interferometric modulation 423 1999
7,123,216 Photonic MEMS and structures 482 1999
7,138,984 Directly laminated touch sensitive screen 89 2001
6,867,896 Interferometric modulation of radiation 364 2001
6,680,792 Interferometric modulation of radiation 457 2001
6,650,455 Photonic mems and structures 455 2001
2002/0075,555 Interferometric modulation of radiation 387 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 349 2002
7,042,643 Interferometric modulation of radiation 155 2002
7,126,738 Visible spectrum modulator arrays 116 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 399 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 250 2002
7,110,158 Photonic MEMS and structures 158 2002
7,072,096 Uniform illumination system 132 2002
6,912,022 Optical interference color display and optical interference modulator 227 2003
7,342,709 Optical interference type of color display having optical diffusion layer between substrate and electrode 38 2003
6,982,820 Color changeable pixel 144 2003
6,995,890 Interference display unit 122 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 128 2003
6,882,458 Structure of an optical interference display cell 228 2003
6,999,236 Optical-interference type reflective panel and method for making the same 87 2004
6,871,982 High-density illumination system 190 2004
2005/0195,468 Integrated modulator illumination 51 2004
6,999,225 Optical interference display panel 112 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 190 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 218 2004
2005/0195,462 Interference display plate and manufacturing method thereof 226 2004
7,006,272 Color changeable pixel 108 2004
7,038,752 Optical interference type of color display 38 2004
2005/0212,738 Method and system for color optimization in a display 27 2005
7,342,705 Spatial light modulator with integrated optical compensation structure 46 2005
7,855,824 Method and system for color optimization in a display 15 2005
2006/0077,514 System and method of reducing color shift in a display 11 2005
2006/0077,522 Method and device for compensating for color shift as a function of angle of view 10 2005
7,630,123 Method and device for compensating for color shift as a function of angle of view 23 2005
7,813,026 System and method of reducing color shift in a display 10 2005
2006/0077,512 Display device having an array of spatial light modulators with integrated color filters 20 2005
7,349,141 Method and post structures for interferometric modulation 19 2005
7,710,632 Display device having an array of spatial light modulators with integrated color filters 22 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 35 2005
2006/0132,383 SYSTEM AND METHOD FOR ILLUMINATING INTERFEROMETRIC MODULATOR DISPLAY 61 2005
7,016,095 Method for fabricating an interference display unit 48 2005
2006/0077,122 Apparatus and method for reducing perceived color shift 19 2005
2006/0066,557 Method and device for reflective display with time sequential color illumination 25 2005
2006/0077,127 Controller and driver features for bi-stable display 58 2005
2006/0077,146 System and method for display device with integrated desiccant 11 2005
2006/0077,149 Method and device for manipulating color in a display 24 2005
2006/0066,599 Reflective display pixels arranged in non-rectangular arrays 61 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 26 2005
2006/0066,586 Touchscreens for displays 39 2005
2006/0077,154 Optical films for directing light towards active areas of displays 23 2005
7,508,571 Optical films for controlling angular characteristics of displays 27 2005
7,561,323 Optical films for directing light towards active areas of displays 28 2005
2006/0077,124 Method and device for manipulating color in a display 39 2005
7,304,784 Reflective display device having viewable display on both sides 33 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 78 2005
7,750,886 Methods and devices for lighting displays 39 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 23 2005
2006/0066,541 Method and device for manipulating color in a display 53 2005
2006/0067,600 Display element having filter material diffused in a substrate of the display element 39 2005
2006/0067,651 Photonic MEMS and structures 86 2005
7,564,612 Photonic MEMS and structures 53 2005
7,807,488 Display element having filter material diffused in a substrate of the display element 17 2005
7,911,428 Method and device for manipulating color in a display 14 2005
7,369,294 Ornamental display device 38 2005
2006/0066,511 Systems and methods using interferometric optical modulators and diffusers 41 2005
7,710,636 Systems and methods using interferometric optical modulators and diffusers 19 2005
2006/0067,633 Device and method for wavelength filtering 29 2005
7,898,521 Device and method for wavelength filtering 17 2005
2007/0196,040 Method and apparatus for providing back-lighting in an interferometric modulator display device 32 2006
7,603,001 Method and apparatus for providing back-lighting in an interferometric modulator display device 36 2006
7,400,439 Uniform illumination system 44 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 40 2006
7,643,203 Interferometric optical display system with broadband characteristics 17 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 42 2006
2007/0247,704 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 29 2006
2006/0198,013 Integrated modulator illumination 29 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 15 2006
7,369,292 Electrode and interconnect materials for MEMS devices 13 2006
7,880,954 Integrated modulator illumination 14 2006
2006/0262,279 Interferometric modulation of radiation 14 2006
7,848,001 Method and system for interferometric modulation in projection or peripheral devices 4 2006
2006/0274,400 Method and device for modulating light with optical compensation 62 2006
7,907,319 Method and device for modulating light with optical compensation 19 2006
7,187,489 Photonic MEMS and structures 74 2006
2007/0042,524 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 15 2006
2008/0049,450 ANGLE SWEEPING HOLOGRAPHIC ILLUMINATOR 18 2006
7,845,841 Angle sweeping holographic illuminator 10 2006
2008/0084,600 System and method for reducing visual artifacts in displays 28 2006
7,855,827 Internal optical isolation structure for integrated front or back lighting 11 2006
7,385,748 Visible spectrum modulator arrays 26 2006
2008/0100,900 Light guide including optical scattering elements and a method of manufacture 21 2006
7,864,395 Light guide including optical scattering elements and a method of manufacture 14 2006
2007/0132,843 METHOD AND SYSTEM FOR INTERFEROMETRIC MODULATION IN PROJECTION OR PERIPHERAL DEVICES 29 2007
7,403,180 Hybrid color synthesis for multistate reflective modulator displays 17 2007
2008/0180,956 SYSTEMS AND METHODS OF PROVIDING A LIGHT GUIDING LAYER 13 2007
7,777,954 Systems and methods of providing a light guiding layer 16 2007
2008/0218,834 Method and apparatus for providing a light absorbing mask in an interferometric modulator display 10 2007
7,916,378 Method and apparatus for providing a light absorbing mask in an interferometric modulator display 3 2007
7,520,642 High-density illumination system 33 2007
2007/0253,054 DISPLAY DEVICES COMPRISING OF INTERFEROMETRIC MODULATOR AND SENSOR 53 2007
7,733,439 Dual film light guide for illuminating displays 21 2007
2007/0229,936 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 39 2007
2009/0059,346 Interferometric Optical Modulator With Broadband Reflection Characteristics 16 2007
2010/0026,727 OPTICAL LOSS STRUCTURE INTEGRATED IN AN ILLUMINATION APPARATUS 16 2007
2010/0141,557 LIGHT GUIDE 17 2007
2009/0231,877 THIN LIGHT BAR AND METHOD OF MANUFACTURING 17 2007
2009/0126,792 THIN FILM SOLAR CONCENTRATOR/COLLECTOR 37 2007
2009/0293,955 PHOTOVOLTAICS WITH INTERFEROMETRIC MASKS 26 2007
2009/0147,332 DECOUPLED HOLOGRAPHIC FILM AND DIFFUSER 28 2007
2009/0147,535 LIGHT ILLUMINATION OF DISPLAYS WITH FRONT LIGHT GUIDE AND COUPLING ELEMENTS 27 2007
2009/0168,459 LIGHT GUIDE INCLUDING CONJUGATE FILM 29 2007
2009/0101,192 PHOTOVOLTAIC DEVICES WITH INTEGRATED COLOR INTERFEROMETRIC FILM STACKS 28 2007
2008/0137,175 OPTICAL INTERFERENCE TYPE OF COLOR DISPLAY HAVING OPTICAL DIFFUSION LAYER BETWEEN SUBSTRATE AND ELECTRODE 12 2008
2008/0151,347 SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE 37 2008
2008/0180,777 METHOD AND POST STRUCTURES FOR INTERFEROMETRIC MODULATION 7 2008
2009/0225,394 SYSTEM AND METHOD OF ILLUMINATING INTERFEROMETRIC MODULATORS USING BACKLIGHTING 11 2008
7,719,747 Method and post structures for interferometric modulation 13 2008
7,688,494 Electrode and interconnect materials for MEMS devices 10 2008
2009/0323,153 BACKLIGHT DISPLAYS 24 2008
2008/0266,333 HYBRID COLOR SYNTHESIS FOR MULTISTATE REFLECTIVE MODULAR DISPLAYS 11 2008
7,813,029 Devices and methods for enhancing color shift of interferometric modulators 17 2008
2009/0073,540 SEMI-TRANSPARENT/TRANSFLECTIVE LIGHTED INTERFEROMETRIC DEVICES 12 2008
2009/0101,623 ETCHING PROCESSES USED IN MEMS PRODUCTION 8 2008
2009/0323,144 ILLUMINATION DEVICE WITH HOLOGRAPHIC LIGHT GUIDE 15 2008
2009/0103,161 DISPLAY WITH INTEGRATED PHOTOVOLTAIC DEVICE 17 2008
2009/0103,165 Display with Integrated Photovoltaics 11 2008
2009/0103,166 ADJUSTABLY TRANSMISSIVE MEMS-BASED DEVICES 23 2008
2009/0086,301 DISPLAY ELEMENT HAVING FILTER MATERIAL DIFFUSED IN A SUBSTRATE OF THE DISPLAY ELEMENT 21 2008
2009/0151,771 PHOTOVOLTAICS WITH INTERFEROMETRIC RIBBON MASKS 19 2008
2009/0242,024 PHOTOVOLTAICS WITH INTERFEROMETRIC BACK SIDE MASKS 19 2008
2009/0097,100 OPTICAL FILMS FOR CONTROLLING ANGULAR CHARACTERISTICS OF DISPLAYS 24 2008
2010/0096,011 HIGH EFFICIENCY INTERFEROMETRIC COLOR FILTERS FOR PHOTOVOLTAIC MODULES 18 2009
2009/0199,893 THIN FILM HOLOGRAPHIC SOLAR CONCENTRATOR/COLLECTOR 12 2009
2009/0199,900 THIN FILM HOLOGRAPHIC SOLAR CONCENTRATOR/COLLECTOR 12 2009
2009/0201,565 DEVICES AND METHODS FOR ENHANCING BRIGHTNESS OF DISPLAYS USING ANGLE CONVERSION LAYERS 20 2009
2009/0201,571 INTEGRATED FRONT LIGHT DIFFUSER FOR REFLECTIVE DISPLAYS 18 2009
2010/0096,006 MONOLITHIC IMOD COLOR ENHANCED PHOTOVOLTAIC CELL 19 2009
2010/0238,529 DITHERED HOLOGRAPHIC FRONTLIGHT 7 2009
2009/0190,373 ILLUMINATION DEVICE WITH BUILT-IN LIGHT COUPLER 24 2009
2009/0251,752 DISPLAY DEVICE WITH DIFFRACTIVE OPTICS 18 2009
2009/0255,569 METHOD TO IMPROVE PV AESTHETICS AND EFFICIENCY 10 2009
2009/0257,108 LIGHT WITH BI-DIRECTIONAL PROPAGATION 12 2009
2009/0296,194 OPTICAL FILMS FOR DIRECTING LIGHT TOWARDS ACTIVE AREAS OF DISPLAYS 18 2009
2009/0310,208 METHOD AND APPARATUS FOR PROVIDING BACK-LIGHTING IN A DISPLAY DEVICE 19 2009
7,933,475 Method and apparatus for providing back-lighting in a display device 7 2009
2010/0165,443 SYSTEMS AND METHODS USING INTERFEROMETRIC OPTICAL MODULATORS AND DIFFUSERS 15 2009
2010/0245,975 DISPLAY DEVICE HAVING AN ARRAY OF SPATIAL LIGHT MODULATORS WITH INTEGRATED COLOR FILTERS 18 2009
2010/0149,624 METHOD AND DEVICE FOR COMPENSATING FOR COLOR SHIFT AS A FUNCTION OF ANGLE OF VIEW 14 2009
2011/0075,246 METHOD AND APPARATUS FOR PROVIDING A LIGHT ABSORBING MASK IN AN INTERFEROMETRIC MODULATOR DISPLAY 3 2010
2010/0172,012 SYSTEM AND METHOD OF REDUCING COLOR SHIFT IN A DISPLAY 9 2010
2010/0245,370 EM SHIELDING FOR DISPLAY DEVICES 12 2010
2010/0302,616 ILLUMINATION DEVICES AND METHODS OF FABRICATION THEREOF 8 2010
2010/0302,802 ILLUMINATION DEVICES 10 2010
2010/0302,803 ILLUMINATION DEVICES AND METHODS OF FABRICATION THEREOF 7 2010
2010/0309,540 METHOD AND DEVICE FOR PROVIDING ILLUMINATION TO INTERFEROMETRIC MODULATORS 4 2010
2011/0025,727 MICROSTRUCTURES FOR LIGHT GUIDE ILLUMINATION 6 2010
2011/0043,889 METHOD AND APPARATUS FOR PROVIDING BRIGHTNESS CONTROL IN AN INTERFEROMETRIC MODULATOR (IMOD) DISPLAY 9 2010
 
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5,606,441 Multiple phase light modulation using binary addressing 210 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 291 1994
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6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 276 1998
6,282,010 Anti-reflective coatings for spatial light modulators 270 1999
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6,466,358 Analog pulse width modulation cell for digital micromechanical device 204 2000
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Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (1)
8,416,154 Apparatus and method for reducing perceived color shift 0 2011

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