Vacuum processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Feb 14, 2012
Grant Date -
Dec 31, 2009
app pub date -
Sep 2, 2009
filing date -
Dec 22, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A grease supply mechanism is provided inside a vacuum transfer chamber. The grease supply mechanism includes: a grease storage part in a bottomed cylindrical shape storing grease therein; and a movable cover covering an opening of the grease storage part and sliding while being in contact with an inner wall of the grease storage part. When the cover is pressed and moved, the grease is supplied into a grease inlet via a grease supply port.
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