System and method for micro-electromechanical operation of an interferometric modulator
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United States of America Patent
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Feb 14, 2012
Grant Date -
Jan 22, 2009
app pub date -
Sep 30, 2008
filing date -
Jul 29, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.
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