laser output power control during warm-up
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United States of America Patent
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Feb 14, 2012
Grant Date -
Jul 28, 2011
app pub date -
Apr 1, 2010
filing date -
Jan 22, 2010
priority date (Note) -
Expired
status (Latency Note)
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Abstract
gas discharge laser includes a housing enclosing spaced-apart electrodes and a lasing gas. A laser resonator extends between the spaced-apart electrodes. An RF power supply provides RF power for creating a discharge in the lasing gas, causing laser radiation to be delivered by the laser resonator. The power of the output radiation is directly dependent on the RF power provided to the electrodes and inversely dependent of the temperature of the gas discharge. A signal representative of the discharge-temperature is used to adjust the RF power supplied to the electrodes such that the power of the output radiation is about constant.
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