Method of manufacturing magnetic head for perpendicular magnetic recording with shield around main magnetic pole
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United States of America Patent
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Feb 21, 2012
Grant Date -
Jun 2, 2011
app pub date -
Nov 30, 2009
filing date -
Nov 30, 2009
priority date (Note) -
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Abstract
A manufacturing method for a magnetic head includes the steps of: forming a structure on a lower shield, the structure including a lower gap, a main magnetic pole and first and second side gaps; forming first and second side shields; forming an upper gap; and forming an upper shield. In the step of forming the structure, an initial lower gap layer is formed on the lower shield, the initial lower gap layer including a pre-lower-gap portion, and two to-be-removed portions that are located on opposite sides of the pre-lower-gap portion. Then, a protrusion including the main magnetic pole and the first and second side gaps is formed on the pre-lower-gap portion. With the top surface of the protrusion covered with a mask, the initial lower gap layer is etched in part to thereby form the lower gap.
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