Method to make a perpendicular magnetic recording head with a side write shield
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United States of America Patent
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Feb 21, 2012
Grant Date -
Jun 23, 2011
app pub date -
Feb 28, 2011
filing date -
Feb 2, 2006
priority date (Note) -
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Abstract
A perpendicular magnetic recording (PMR) head is fabricated with a self-aligned pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed from a shield layer by a RIE process characterized by a mask and gases producing a variety of etch rates. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that then separates the layer into two shields. The pole tip is then plated within the trench and an upper shield is formed above the side shields and pole.
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