Method of preparing an electrically insulating film and application for the metallization of vias

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Feb 21, 2012
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Jun 30, 2009
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Jul 1, 2008

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Abstract

The present invention essentially relates to a method of preparing an electrically insulating film at the surface of an electrical conductor or semiconductor substrate, such as a silicon substrate.

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ALCHIMER

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Gonzalez, José	Paris, FR	7	19
Mevellec, Vincent	Boulogne Billancourt, FR	16	57
Suhr, Dominique	Chatenay Malabry, FR	11	28

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Method of preparing an electrically insulating film and application for the metallization of vias

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United States of America Patent

12495137

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US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
February 21, 2012	US,8119542,B2 US8119542B2	GRANTED PATENT AS SECOND PUBLICATION
January 07, 2010	US,20100003808,A1 US20100003808A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	8119542
SERIAL NO	12495137
DOCKET NO

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12495137

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