System and method for free space micro machined optical bench
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United States of America Patent
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Feb 21, 2012
Grant Date -
Aug 6, 2009
app pub date -
Feb 5, 2008
filing date -
Feb 5, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
An optical bench communicates light through free space in a plurality of trenches formed in the bench, each of the trenches formed by deep ion reactive etching and defined by two opposing side walls, such that the free space is between the opposing side walls. An exemplary embodiment has a first trench operable to receive the beam of light and operable to communicate the beam of light through the free space in the first trench; an angled reflection side wall operable to receive the beam of light routed through the first trench and operable to reflect at least a portion of the beam of light; and a second trench operable to receive the portion of the beam of light reflected from the angled reflection side wall and operable to route the portion of the beam of light through the free space in the second trench.
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