Multi-diaphragm pressure sensors
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United States of America Patent
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Feb 28, 2012
Grant Date -
N/A
app pub date -
Sep 3, 2010
filing date -
Jun 5, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to a pressure sensor comprising multiple flexible diaphragms to which are affixed, within which are embedded, or which themselves constitute part of transducer elements that are connected together electrically, providing greater sensitivity and allowing the diaphragms to be made smaller, thereby increasing burst pressure to operating pressure ratio. This multi-diaphragm pressure sensor can therefore be used to accurately measure small changes in dynamic pressure in a fluid of overall high static pressure, for example, in a flow inventory control system as may be used in a fire suppression system, or for control of nuclear reactor systems.
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