Method for forming sputter target assemblies

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United States of America Patent

PATENT NO 8123107
APP PUB NO 20050263570A1
SERIAL NO

10852117

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Abstract

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The method forms a sputter target assembly by attaching a sputter target to an insert and applying a bond metal layer between the insert and a backing plate. Then pressing the insert and backing plate together forms a solid state bond with the bond metal layer, attaches the insert to the backing plate and forms at least one cooling channel between the insert and the backing plate.

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Patent Owner(s)

Patent OwnerAddress
PRAXAIR S T TECHNOLOGY INC441 SACKETT POINT ROAD NORTH HAVEN CT 06473

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gilman, Paul S Suffern, US 71 1065
Hunt, Thomas J Peekskill, US 42 682
Koenigsmann, Holger J Congers, US 15 266
Perry, Andrew C Oradell, US 13 99

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