Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers
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United States of America
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Feb 28, 2012
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Mar 22, 2007
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Mar 22, 2007
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Abstract
Methods for fabricating sublithographic, nanoscale microchannels utilizing an aqueous emulsion of an amphiphilic agent and a water-soluble, hydrogel-forming polymer, and films and devices formed from these methods are provided.
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