Apparatus and method for the determination of the position of a disk-shaped object

United States of America Patent

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Feb 28, 2012
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Apr 8, 2010
app pub date
Sep 9, 2009
filing date
Oct 7, 2008

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Expired

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Abstract

The invention relates to an apparatus for the determination of the position of a disc-shaped object, particularly of a wafer (10). Thereby, a mount (14) for supporting the sensor device (11) is provided on a movable carrier (22).

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Patent Owner	Address
VISTEC SEMICONDUCTOR SYSTEMS JENA GMBH	GOESCHWITZER STRASSE 25 JENA 07745

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G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Pohlmann, Ulrich	Jena, DE	11	63
Rennicke, Frank	Grosspuerschuetz, DE	1	4
Weniger, Gert	Jena, DE	5	23

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Apparatus and method for the determination of the position of a disk-shaped object

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United States of America Patent

12556175

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PATENT NO	8125653
APP PUB NO	20100085582A1
SERIAL NO	12556175
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
February 28, 2012	US,8125653,B2 US8125653B2	GRANTED PATENT AS SECOND PUBLICATION
April 08, 2010	US,20100085582,A1 US20100085582A1	FIRST PUBLISHED PATENT APPLICATION

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12556175

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