MEMS device fabricated on a pre-patterned substrate
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United States of America Patent
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Feb 28, 2012
Grant Date -
May 27, 2010
app pub date -
Jan 27, 2010
filing date -
Sep 27, 2004
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Expired
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Abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
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