Film-forming apparatus
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United States of America Patent
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Mar 6, 2012
Grant Date -
Jul 16, 2009
app pub date -
Mar 16, 2009
filing date -
Feb 9, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A film-forming apparatus of the invention is a film-forming apparatus that includes: a processing container that defines a chamber, a pedestal arranged in the chamber, on which a substrate to be processed can be placed, a showerhead provided opposite to the pedestal, which has a large number of gas-discharging holes, a gas-supplying mechanism that supplies a process gas into the chamber through the showerhead, and a showerhead-temperature controlling unit that controls a temperature of the showerhead.
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Family
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Cited Art Landscape
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