Method of evaluating a film

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United States of America Patent

PATENT NO 8131492
APP PUB NO 20080183420A1
SERIAL NO

11964206

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of directly measuring hydrogen permeability of a film is provided. The method of evaluating a film includes acquiring, with respect to a specimen including a plurality of films stacked on each other, ion dose-dependence data of intensity of γ-beam generated by hydrogen resonant nuclear reaction, and fitting the data with a functional equation of the ion dose.

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Patent Owner(s)

Patent OwnerAddress
RENESAS ELECTRONICS CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Shien Kanagawa, JP 5 38
Fukutani, Katsuyuki Tokyo, JP 1 0
Wilde, Markus Tokyo, JP 7 34

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