US Patent No: 8,134,772
Number of patents in Portfolio can not be more than 2000
Mirror device with an anti-stiction layer
Stats
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Mar 13, 2012
Issued date -
May 2, 2008
filing date -
12/151,219
serial no -
In Force
status
Importance
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Abstract
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
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First Claim
Related Publications
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 5,214,420 Spatial light modulator projection system with random polarity light | 285 | 1991 | |
| 5,331,454 Low reset voltage process for DMD | 337 | 1992 | |
| 5,411,769 Method of producing micromechanical devices | 251 | 1993 | |
| 5,602,671 Low surface energy passivation layer for micromechanical devices | 265 | 1994 | |
| 5,447,600 Polymeric coatings for micromechanical devices | 93 | 1994 | |
| 5,576,878 Use of incompatible materials to eliminate sticking of micro-mechanical devices | 55 | 1994 | |
| 5,512,374 PFPE coatings for micro-mechanical devices | 87 | 1994 | |
| 5,523,878 Self-assembled monolayer coating for micro-mechanical devices | 93 | 1994 | |
| 6,053,617 Manufacture method for micromechanical devices | 21 | 1994 | |
| 5,579,151 Spatial light modulator | 68 | 1995 | |
| 6,099,132 Manufacture method for micromechanical devices | 200 | 1995 | |
| 6,024,801 Method of cleaning and treating a semiconductor device including a micromechanical device | 95 | 1996 | |
| 6,259,551 Passivation for micromechanical devices | 9 | 1999 | |
| 6,475,570 Diluent assisted lubrication of micromechanical devices | 16 | 2001 | |
| 7,009,745 Coating for optical MEMS devices | 6 | 2003 | |
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| 7,880,952 Mirror device with an anti-stiction layer | 2 | 2008 | |
| 2009/0231,668 Mirror device with an anti-stiction layer | 2 | 2008 | |
| 7,643,195 Mirror device | 1 | 2008 | |
| 2008/0285,111 Mirror device | 1 | 2008 | |
| 7,652,813 Mirror device | 1 | 2008 | |
| 7,755,830 Micro mirror device | 2 | 2009 | |
| 7,760,415 Micro mirror device | 1 | 2009 | |
| 7,933,060 Three states of micro mirror device | 1 | 2009 | |
| 7,876,488 Mirror device having vertical hinge | 1 | 2009 | |
| 2010/0128,335 Mirror device | 1 | 2010 | |
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| 6,576,489 Methods of forming microstructure devices | 36 | 2001 | |
| 6,666,979 Dry etch release of MEMS structures | 23 | 2001 | |
| 6,830,950 Integrated method for release and passivation of MEMS structures | 9 | 2002 | |
| 6,902,947 Integrated method for release and passivation of MEMS structures | 30 | 2003 | |
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| 7,471,439 Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant | 3 | 2005 | |
| 2007/0114,882 Anti-stiction gas-phase lubricant for micromechanical systems | 3 | 2005 | |
| 7,372,615 Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant | 3 | 2006 | |
| 2007/0117,244 PREFERENTIALLY DEPOSITED LUBRICANT TO PREVENT ANTI-STICTION IN MICROMECHANICAL SYSTEMS | 6 | 2006 | |
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| 6,815,361 Method of fabricating anti-stiction micromachined structures | 12 | 2001 | |
| 6,906,845 Micro-mechanical device having anti-stiction layer and method of manufacturing the device | 4 | 2003 | |
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| 2001/0040,675 Method for forming a micromechanical device | 82 | 2001 | |
| 6,958,846 Spatial light modulators with light absorbing areas | 12 | 2002 | |
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| 6,674,140 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor | 21 | 2001 | |
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| 6,808,745 Method of coating micro-electromechanical devices | 6 | 2002 | |
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| 2004/0190,817 Multi-tilt micromirror systems with concealed hinge structures | 26 | 2004 | |
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| 7,045,170 Anti-stiction coating for microelectromechanical devices | 14 | 2002 | |
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| 7,256,467 Materials and methods for forming hybrid organic-inorganic anti-stiction materials for micro-electromechanical systems | 7 | 2003 | |
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| 2008/0116,554 PACKAGING MICRO DEVICES | 3 | 2006 | |
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| 7,057,794 Micromirror for MEMS device | 5 | 2004 | |
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| 6,114,044 Method of drying passivated micromachines by dewetting from a liquid-based process | 34 | 1997 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Sep 13, 2015 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Sep 13, 2019 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 13, 2023 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |