Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same
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United States of America Patent
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Mar 20, 2012
Grant Date -
Oct 22, 2009
app pub date -
Apr 21, 2008
filing date -
Apr 21, 2008
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Embodiments of the present invention provide microelectromechanical systems (MEMS) switching methods and apparatus having improved performance and lifetime as compared to conventional MEMS switches. In some embodiments, a MEMS switch may include a resilient contact element comprising a beam and a tip configured to wipe a contact surface; and a MEMS actuator having an open position that maintains the tip and the contact surface in a spaced apart relation and a closed position that brings the tip into contact with the contact surface, wherein the resilient contact element and the MEMS actuator are disposed on a substrate and are movable in a plane substantially parallel to the substrate. In some embodiments, various contact elements are provided for the MEMS switch. In some embodiments, various actuators are provided for control of the operation of the MEMS switch.
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