Method and apparatus for measuring optical extinction in a thin film during its deposition
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United States of America Patent
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Mar 20, 2012
Grant Date -
Jul 22, 2010
app pub date -
Oct 26, 2006
filing date -
Oct 26, 2005
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Abstract
A method of measuring the extinction of light in a coating including the steps of: directing a light beam to a substrate to be coated at an angle of incidence for which the beam undergoes nominal total internal reflection; depositing a coating on the substrate such that the light beam will be waveguided in the coating thus reducing internal reflection for a period of deposition time; measuring a reduction of the internal reflection during deposition; and calculating an extinction value of the light beam in the deposited layer corresponding to the measured drop in internal reflection.
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