Electromechanical element, electric circuit device and production method of those
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United States of America Patent
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Mar 27, 2012
Grant Date -
Jul 24, 2008
app pub date -
Feb 19, 2007
filing date -
Feb 20, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An electromechanical element includes a mechanically movable element through a hollow formed on a substrate, and a plurality of holes formed in the movable element. In the electromechanical element, the plurality of holes are arranged such that at least two holes are in a same line, at least one hole is in another line located adjacent to the one line with at least two holes, and a distance between one of the holes arranged in the same line and the other hole located at the closest position from the one of the two holes arranged in the same line is longer than a distance between the holes adjacently arranged in the same line.
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