Ultrasonic motorized stage
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 27, 2012
Grant Date -
Mar 4, 2010
app pub date -
Aug 13, 2009
filing date -
Sep 3, 2008
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An ultrasonic motorized stage includes a base part, first and second tables, first and second linear ultrasonic motors which respectively drive the first and the second tables, and first and second optical linear sensors which respectively detect the amount of move of the first and the second tables. The first and the second linear ultrasonic motors and the first and the second optical linear sensors are arranged in positions, which are at sides other than the front side of the ultrasonic motorized stage and prevent wear debris generated when the first and/or the second linear ultrasonic motor is driven from affecting the first and the second optical linear sensors, so that the first and the second linear ultrasonic motors and the first and the second optical linear sensors do not protrude upward from the upper surface of the second table.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully