US Patent No: 8,149,497

Number of patents in Portfolio can not be more than 2000

Support structure for MEMS device and methods therefor

ALSO PUBLISHED AS: 20100149627

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.

Loading the Abstract Image... loading....

First Claim

See full text

all claims..

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA660

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 320 5533
Ganti, Suryaprakash Clifton Park, NY 49 274
Kothari, Manish Cupertino, CA 311 3916
Sampsell, Jeffrey B San Jose, CA 247 13425
Sasagawa, Teruo Los Gatos, CA 88 831
Wang, Chun-Ming Taipei County, TW 73 532

Cited Art Landscape

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (51)
5,835,255 Visible spectrum modulator arrays 516 1994
6,040,937 Interferometric modulation 649 1996
5,986,796 Visible spectrum modulator arrays 496 1996
6,674,562 Interferometric modulation of radiation 691 1998
7,123,216 Photonic MEMS and structures 559 1999
6,867,896 Interferometric modulation of radiation 401 2001
6,680,792 Interferometric modulation of radiation 523 2001
6,650,455 Photonic mems and structures 519 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 400 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 467 2002
7,110,158 Photonic MEMS and structures 180 2002
6,747,800 Optical interference type panel and the manufacturing method thereof 149 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 106 2003
6,982,820 Color changeable pixel 159 2003
7,012,726 MEMS devices with unreleased thin film components 76 2003
7,198,973 Method for fabricating an interference display unit 102 2003
6,995,890 Interference display unit 130 2003
2004/0209,195 Method for fabricating an interference display unit 223 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 200 2003
6,882,458 Structure of an optical interference display cell 244 2003
6,999,236 Optical-interference type reflective panel and method for making the same 93 2004
7,119,945 Altering temporal response of microelectromechanical elements 137 2004
7,078,293 Method for fabricating optical interference display cell 59 2004
6,999,225 Optical interference display panel 123 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 234 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 199 2004
2005/0195,462 Interference display plate and manufacturing method thereof 242 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 50 2004
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 15 2005
2006/0066,932 Method of selective etching using etch stop layer 70 2005
2006/0077,503 System and method of providing MEMS device with anti-stiction coating 27 2005
7,446,926 System and method of providing a regenerating protective coating in a MEMS device 20 2005
7,547,565 Method of manufacturing optical interference color display 13 2005
2006/0079,048 Method of making prestructure for MEMS systems 69 2005
7,492,502 Method of fabricating a free-standing microstructure 12 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 204 2005
7,684,104 MEMS using filler material and method 11 2005
7,485,236 Interference display cell and fabrication method thereof 11 2005
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 13 2006
7,532,377 Movable micro-electromechanical device 38 2006
7,706,044 Optical interference display cell and method of making the same 9 2006
7,679,812 Support structure for MEMS device and methods therefor 26 2006
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 17 2007
7,723,015 Method for manufacturing an array of interferometeric modulators 12 2007
2008/0041,817 STRUCTURE OF A MICRO ELECTRO MECHANICAL SYSTEM AND THE MANUFACTURING METHOD THEREOF 17 2007
7,556,917 Method for manufacturing an array of interferometric modulators 13 2007
2008/0130,089 METHOD OF FABRICATING MEMS DEVICES (SUCH AS IMod) COMPRISING USING A GAS PHASE ETCHANT TO REMOVE A LAYER 32 2008
2009/0022,884 SYSTEM AND METHOD FOR MICRO-ELECTROMECHANICAL OPERATION OF AN INTERFEROMETRIC MODULATOR 17 2008
2009/0323,168 ELECTROMECHANICAL DEVICES AND METHODS OF FABRICATING SAME 17 2009
2010/0320,555 CONTROLLING ELECTROMECHANICAL BEHAVIOR OF STRUCTURES WITHIN A MICROELECTROMECHANICAL SYSTEMS DEVICE 10 2010
 
TEXAS INSTRUMENTS INCORPORATED (27)
4,500,171 Process for plastic LCD fill hole sealing 210 1982
4,566,935 Spatial light modulator and method 512 1984
4,710,732 Spatial light modulator and method 490 1984
4,956,619 Spatial light modulator 581 1988
4,954,789 Spatial light modulator 570 1989
5,083,857 Multi-level deformable mirror device 535 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 317 1991
5,233,456 Resonant mirror and method of manufacture 305 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 382 1992
5,231,532 Switchable resonant filter for optical radiation 247 1992
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 411 1993
5,583,688 Multi-level digital micromirror device 469 1993
5,606,441 Multiple phase light modulation using binary addressing 225 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 284 1994
5,485,304 Support posts for micro-mechanical devices 120 1994
5,526,951 Fabrication method for digital micro-mirror devices using low temperature CVD 58 1994
5,650,881 Support post architecture for micromechanical devices 264 1994
5,497,262 Support posts for micro-mechanical devices 97 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 410 1995
5,631,782 Support post architecture for micromechanical devices 79 1995
5,646,768 Support posts for micro-mechanical devices 308 1995
6,447,126 Support post architecture for micromechanical devices 330 1995
5,784,212 Method of making a support post for a micromechanical device 238 1996
6,100,477 Recessed etch RF micro-electro-mechanical switch 130 1998
6,038,056 Spatial light modulator having improved contrast ratio 266 1999
6,635,919 High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications 119 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 186 2001
 
VENTURE LENDING & LEASING IV, INC. (7)
2001/0040,675 Method for forming a micromechanical device 86 2001
7,041,224 Method for vapor phase etching of silicon 45 2002
6,849,471 Barrier layers for microelectromechanical systems 68 2003
6,960,305 Methods for forming and releasing microelectromechanical structures 79 2003
2005/0045,276 Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants 35 2004
6,972,891 Micromirror having reduced space between hinge and mirror plate of the micromirror 39 2005
7,459,402 Protection layers in micromirror array devices 62 2005
 
LUCENT TECHNOLOGIES INC. (5)
5,825,528 Phase-mismatched fabry-perot cavity micromechanical modulator 321 1995
5,751,469 Method and apparatus for an improved micromechanical modulator 107 1996
5,838,484 Micromechanical optical modulator with linear operating characteristic 196 1996
5,808,781 Method and apparatus for an improved micromechanical modulator 150 1997
6,008,123 Method for using a hardmask to form an opening in a semiconductor substrate 42 1997
 
HONEYWELL INTERNATIONAL INC. (4)
6,215,221 Electrostatic/pneumatic actuators for active surfaces 152 1998
6,288,472 Electrostatic/pneumatic actuators for active surfaces 98 2000
6,358,021 Electrostatic actuators for active surfaces 76 2000
6,905,613 Use of an organic dielectric as a sacrificial layer 15 2001
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (4)
4,560,435 Composite back-etch/lift-off stencil for proximity effect minimization 115 1984
5,656,554 Semiconductor chip reclamation technique involving multiple planarization processes 47 1994
6,342,452 Method of fabricating a Si3N4/polycide structure using a dielectric sacrificial layer as a mask 29 2000
7,041,571 Air gap interconnect structure and method of manufacture 47 2004
 
SANDIA CORPORATION (4)
5,345,328 Tandem resonator reflectance modulator 147 1992
5,867,302 Bistable microelectromechanical actuator 379 1997
6,812,482 Method to fabricate layered material compositions 69 2001
6,967,757 Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation 44 2003
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (3)
5,745,281 Electrostatically-driven light modulator and display 299 1996
6,806,110 Monolithic multi-wavelength vertical-cavity surface emitting laser array and method of manufacture therefor 33 2002
6,953,702 Fixed wavelength vertical cavity optical devices and method of manufacture therefor 31 2002
 
FREESCALE SEMICONDUCTOR, INC. (3)
5,324,683 Method of forming a semiconductor structure having an air region 416 1993
5,381,040 Small geometry contact 53 1993
6,465,320 Electronic component and method of manufacturing 19 2000
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (3)
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 277 2001
2003/0202,264 Micro-mirror device 205 2002
2006/0234,412 MEMS release methods 18 2005
 
MAPLE VISION TECHNOLOGIES INC. (3)
5,914,803 Thin film actuated mirror array in an optical projection system and method for manufacturing the same 72 1997
5,920,421 Thin film actuated mirror array in an optical projection system and method for manufacturing the same 60 1997
6,204,080 Method for manufacturing thin film actuated mirror array in an optical projection system 85 1998
 
ROBERT BOSCH GMBH (3)
6,951,824 Method for manufacturing a micromechanical component and a component that is manufactured in accordance with the method 29 2000
2002/0055,253 Method for producing a micromechanical structure and a micromechanical structure 77 2001
6,987,432 Temperature compensation for silicon MEMS resonator 62 2003
 
SILICON LIGHT MACHINES CORPORATION (3)
7,049,164 Microelectronic mechanical system and methods 55 2002
7,027,202 Silicon substrate as a light modulator sacrificial layer 55 2003
7,183,637 Microelectronic mechanical system and methods 11 2005
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (3)
5,726,480 Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same 269 1995
6,448,622 Polycrystalline silicon-germanium films for micro-electromechanical systems application 97 2000
7,256,107 Damascene process for use in fabricating semiconductor structures having micro/nano gaps 33 2005
 
EASTMAN KODAK COMPANY (2)
5,683,649 Method for the fabrication of micro-electromechanical ceramic parts 20 1996
6,284,560 Method for producing co-planar surface structures 66 1998
 
GLOBALFOUNDRIES INC. (2)
5,783,864 Multilevel interconnect structure of an integrated circuit having air gaps and pillars separating levels of interconnect 52 1996
5,998,293 Multilevel interconnect structure of an integrated circuit having air gaps and pillars separating levels of interconnect 34 1998
 
NEOPHOTONICS CORPORATION (2)
6,756,317 Method for making a microstructure by surface micromachining 65 2001
6,778,306 Surface micromachined optical system with reinforced mirror microstructure 71 2003
 
SAMSUNG ELECTRONICS CO., LTD. (2)
6,248,654 Method for forming self-aligned contact 18 1999
6,319,824 Method of forming a contact hole in a semiconductor device 24 1999
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,861,277 Method of forming MEMS device 219 2003
2006/0037,933 Mirror process using tungsten passivation layer for preventing metal-spiking induced mirror bridging and improving mirror curvature 10 2004
 
TELEDYNE SCIENTIFIC & IMAGING, LLC (2)
6,337,027 Microelectromechanical device manufacturing process 40 1999
6,872,319 Process for high yield fabrication of MEMS devices 28 2002
 
ABBOTT LABORATORIES (1)
5,967,163 Actuator and method 68 1996
 
ADVANCED TECHNOLOGY MATERIALS, INC. (1)
2005/0118,832 Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations 36 2003
 
AGERE SYSTEMS INC. (1)
2003/0111,439 Method of forming tapered electrodes for electronic devices 63 2001
 
AKUSTICA, INC. (1)
7,202,101 Multi-metal layer MEMS structure and process for making the same 31 2004
 
APPLIED MATERIALS, INC. (1)
6,666,979 Dry etch release of MEMS structures 25 2001
 
Bell Telephone Laboratories, Incorporated (1)
4,498,953 Etching techniques 144 1983
 
CABOT MICROELECTRONICS CORPORATION (1)
2004/0159,629 MEM device processing with multiple material sacrificial layers 15 2004
 
CALIFORNIA INSTITUTE OF TECHNOLOGY (1)
6,031,653 Low-cost thin-metal-film interference filters 183 1998
 
CENTOCOR ORTHO BIOTECH INC. (1)
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 26 2004
 
CHEETAH OMNI, LLC (1)
6,407,851 Micromechanical optical switch 175 2000
 
CHROMISYS (1)
2002/0071,169 Micro-electro-mechanical-system (MEMS) mirror device 104 2000
 
CITIZEN HOLDINGS CO., LTD. (1)
6,713,235 Method for fabricating thin-film substrate and thin-film substrate fabricated by the method 51 2001
 
CORETEK, INC. (1)
* 2002/0031,155 MICROELECTROMECHANICALLY TUNABLE, CONFOCAL, VERTICAL CAVITY SURFACE EMITTING LASER AND FABRY-PEROT FILTER 56 1998
 
CORNING INCORPORATED (1)
2003/0210,851 MEMS OPTICAL SWITCH ACTUATOR 76 2000
 
CP CLARE (1)
6,297,072 Method of fabrication of a microstructure having an internal cavity 224 1999
 
CYMATICS LABORATORIES CORP. (1)
7,008,812 Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation 111 2000
 
DAEWOO ELECTRONICS CO., LTD. (1)
5,690,839 Method for forming an array of thin film actuated mirrors 21 1995
 
ENERGY, UNITED STATES DEPARTMENT OF (1)
4,880,493 Electronic-carrier-controlled photochemical etching process in semiconductor device fabrication 59 1988
 
ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 279 2002
 
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (1)
6,162,657 Method for manufacturing a micromechanical relay 75 1999
 
FSI INTERNATIONAL, INC. (1)
4,900,395 HF gas etching of wafers in an acid processor 174 1989
 
GEORGIA TECH RESEARCH CORPORATION (1)
6,165,890 Fabrication of a semiconductor device with air gaps for ultra-low capacitance interconnections 154 1998
 
GOLDMAN SACHS BANK USA (1)
2007/0111,533 REMOVAL OF MEMS SACRIFICIAL LAYERS USING SUPERCRITICAL FLUID/CHEMICAL FORMULATIONS 20 2007
 
GSI LUMONICS CORPORATION (1)
2004/0080,832 Solid state etalons with low thermally-induced optical path length change employing crystalline materials having significantly negative temperature coefficients of optical path length 50 2003
 
HEWLETT-PACKARD COMPANY (1)
6,465,355 Method of fabricating suspended microstructures 228 2001
 
HITACHI, LTD. (1)
5,358,806 Phase shift mask, method of correcting the same and apparatus for carrying out the method 34 1992
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (1)
6,359,673 Sheet having a layer with different light modulating materials 63 1999
 
INFINEON TECHNOLOGIES AG (1)
2003/0003,682 Method for manufacturing an isolation trench filled with a high-density plasma-chemical vapor deposition oxide 31 2002
 
INTERSIL CORPORATION (1)
5,801,084 Bonded wafer processing 54 1997
 
INTPAX, INC. (1)
6,620,712 Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications 14 2001
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 299 1999
 
JDS UNIPHASE CORPORATION (1)
2003/0053,078 Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators 153 2001
 
KODAK I L, LTD. (1)
6,618,187 Blazed micro-mechanical light modulator and array thereof 54 2001
 
KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
2010/0044,808 METHOD OF MANUFACTURING A MEMS ELEMENT 20 2006
 
LENOVO (SINGAPORE) PTE LTD. (1)
6,377,233 Micromechanical display and fabrication method 113 2001
 
LOCKHEED MARTIN CORPORATION (1)
5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 258 1989
 
MICRO RELAY HOLDINGS PTY LTD. (1)
2004/0244,191 Method of fabrication of micro-devices 17 2004
 
MINOLTA CO., LTD. (1)
2002/0027,636 Non-flat liquid crystal display element and method of producing the same 93 2001
 
Optron Systems, Inc. (1)
5,287,215 Membrane light modulation systems 177 1991
 
POPKIN FAMILY ASSETS, L.L.C. (1)
2004/0136,076 Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 83 2003
 
QUALCOMM INCORPORATED (1)
7,709,964 Structure of a micro electro mechanical system and the manufacturing method thereof 7 2007
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 74 2004
 
Reflectvity, Inc (1)
6,913,942 Sacrificial layers for use in fabrications of microelectromechanical devices 72 2003
 
RESONANT LLC (1)
6,788,175 Anchors for micro-electro-mechanical systems (MEMS) devices 31 2001
 
ROSEMOUNT AEROSPACE INC. (1)
6,046,659 Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications 223 1998
 
ROYAL BANK CAPITAL PARTNERS (1)
5,673,139 Microelectromechanical television scanning device and method for making the same 317 1993
 
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES (1)
6,991,995 Method of producing a semiconductor structure having at least one support substrate and an ultrathin layer 23 2004
 
SANWA BANK CALIFORNIA (1)
5,293,272 High finesse holographic fabry-perot etalon and method of fabricating 184 1992
 
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. (1)
5,719,068 Method for anisotropic etching conductive film 85 1995
 
SHARP KABUSHIKI KAISHA (1)
4,859,060 Variable interferometric device and a process for the production of the same 384 1986
 
TELEDYNE DALSA SEMICONDUCTOR INC. (1)
6,602,791 Manufacture of integrated fluidic devices 68 2001
 
The Charles Stark Draper Laboratory, Inc. (1)
6,689,211 Etch stop layer system 35 2000
 
The United States of America as represented by the Secretary of the Air Force (1)
6,782,166 Optically transparent electrically conductive charge sheet poling electrodes to maximize performance of electro-optic devices 38 2002
 
THE UNIVERSITY OF WESTERN AUSTRALIA (1)
* 2005/0226,281 Tunable cavity resonator and method of fabricating same 20 2005
 
U.S. PHILIPS CORPORATION (1)
4,519,676 Passive display device 247 1983
 
UNITED MICROELECTRONICS CORP. (1)
6,720,267 Method for forming a cantilever beam model micro-electromechanical system 78 2003
 
WISCONSIN ALUMNI RESEARCH FOUNDATION (1)
5,190,637 Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers 149 1992
 
XEROX CORPORATION (1)
6,674,090 Structure and method for planar lateral oxidation in active 170 1999
 
ZYVEX MANAGEMENT CORPORATION (1)
6,677,225 System and method for constraining totally released microcomponents 32 2000
 
Other [Check patent profile for assignment information] (5)
5,822,110 Reflective light valve modulator 80 1997
2007/0064,760 Optical amplification in miniaturized polymer cavity resonators 19 2004
2005/0014,374 Gap tuning for surface micromachined structures in an epitaxial reactor 61 2004
2005/0170,670 Patterning of sacrificial materials 36 2004
2006/0203,325 Light Modulator Device 25 2006
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
PIXART IMAGING INC. (1)
8,303,827 Method for making micro-electro-mechanical system device 0 2008
* Cited By Examiner

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Oct 3, 2015
7.5 Year Payment $3600.00 $1800.00 $900.00 Oct 3, 2019
11.5 Year Payment $7400.00 $3700.00 $1850.00 Oct 3, 2023
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00