US Patent No: 8,149,497

Number of patents in Portfolio can not be more than 2000

Support structure for MEMS device and methods therefor

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ALSO PUBLISHED AS: 20100149627
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.

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First Claim

Related Publications

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 269 4460
Ganti, Suryaprakash Clifton Park, NY 37 191
Kothari, Manish Cupertino, CA 262 2930
Sampsell, Jeffrey B San Jose, CA 220 12041
Sasagawa, Teruo Los Gatos, CA 74 643
Wang, Chun-Ming Taipei County, TW 69 363

Cited Art

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Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
PIXART IMAGING INC. (1)
8,303,827 Method for making micro-electro-mechanical system device 0 2008

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