US Patent No: 8,149,497

Number of patents in Portfolio can not be more than 2000

Support structure for MEMS device and methods therefor

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ALSO PUBLISHED AS: 20100149627
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Abstract

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A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA623

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 311 4919
Ganti, Suryaprakash Clifton Park, NY 43 224
Kothari, Manish Cupertino, CA 299 3388
Sampsell, Jeffrey B San Jose, CA 243 12542
Sasagawa, Teruo Los Gatos, CA 85 732
Wang, Chun-Ming Taipei County, TW 72 435

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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Patent Info (Count) # Cites Year
 
PIXART IMAGING INC. (1)
8,303,827 Method for making micro-electro-mechanical system device 0 2008

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