US Patent No: 8,149,497

Number of patents in Portfolio can not be more than 2000

Support structure for MEMS device and methods therefor

ALSO PUBLISHED AS: 20100149627
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Abstract

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A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA671

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 322 6015
Ganti, Suryaprakash Clifton Park, NY 51 337
Kothari, Manish Cupertino, CA 314 4329
Sampsell, Jeffrey B San Jose, CA 248 13913
Sasagawa, Teruo Los Gatos, CA 88 950
Wang, Chun-Ming Taipei County, TW 73 614

Cited Art Landscape

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* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
8,988,760 Encapsulated electromechanical devices 0 2010
 
QUALCOMM MEMS TECHNOLOGIES, INC. (3)
8,928,967 Method and device for modulating light 0 2010
8,971,675 Interconnect structure for MEMS device 0 2011
8,970,939 Method and device for multistate interferometric light modulation 0 2012
 
PIXART IMAGING INC. (1)
8,303,827 Method for making micro-electro-mechanical system device 0 2008
* Cited By Examiner

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