Support structure for MEMS device and methods therefor
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United States of America Patent
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Apr 3, 2012
Grant Date -
Jun 17, 2010
app pub date -
Feb 24, 2010
filing date -
Jul 22, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.
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