US Patent No: 8,156,804
Number of patents in Portfolio can not be more than 2000
Capacitive semiconductor sensor
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Apr 17, 2012
Issued date -
Jul 31, 2007
filing date -
11/882,135
serial no -
In Force
status
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Abstract
A capacitive semiconductor sensor includes a sensor chip, a circuit chip, a plurality of bumps, and a plurality of dummy bumps. The sensor chip includes a dynamic quantity detector, which has a detection axis in one direction. The circuit chip includes a signal processing circuit. The sensor chip and the circuit chip are coupled by flip-chip bonding through the plurality of bumps. Furthermore, the sensor chip and the circuit chip are mechanically coupled through the plurality of dummy bumps.
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First Claim
Related Publications
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 6,313,529 Bump bonding and sealing a semiconductor device with solder | 25 | 1998 | |
| 6,430,999 Semiconductor physical quantity sensor including frame-shaped beam surrounded by groove | 3 | 2001 | |
| 6,502,462 Capacitance type dynamic quantity sensor having displacement portion and formed by wire bonding | 4 | 2001 | |
| 6,973,829 Semiconductor dynamic quantity sensor with movable electrode and fixed electrode supported by support substrate | 7 | 2001 | |
| 2004/0238,943 Dynamic quantity sensor | 7 | 2003 | |
| 7,268,435 Capacitive semiconductor sensor | 3 | 2004 | |
| 7,385,296 Sensor device having stopper for limitting displacement | 2 | 2005 | |
| 7,327,004 Sensor device | 7 | 2005 | |
| 2007/0090,536 Sensor having semiconductor chip and circuit chip | 1 | 2006 | |
| 7,678,589 Semiconductor device for providing capacitive semiconductor sensor and method for manufacturing capacitive semiconductor sensor | 1 | 2007 | |
| 7,762,134 Dynamic quantity sensor | 3 | 2007 | |
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| 7,069,789 Inertial sensor | 3 | 2005 | |
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| 6,140,144 Method for packaging microsensors | 102 | 1997 | |
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| 7,205,095 Apparatus and method for packaging image sensing semiconductor chips | 3 | 2003 | |
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| 2008/0156,095 Sensor Device, Sensor System and Methods for Manufacturing Them | 5 | 2005 | |
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| 2005/0275,099 Semiconductor apparatus and method of manufacturing semiconductor apparatus | 1 | 2005 | |
Patent Citation Ranking
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