Chlorine, fluorine and lithium co-doped transparent conductive films and methods for fabricating the same
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United States of America Patent
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Apr 24, 2012
Grant Date -
Jun 25, 2009
app pub date -
Oct 29, 2008
filing date -
Dec 25, 2007
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Abstract
A chlorine, fluorine and lithium co-doped transparent conductive film is provided, including chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %.
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