MEMS cavity-coating layers and methods
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United States of America Patent
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Apr 24, 2012
Grant Date -
Sep 30, 2010
app pub date -
Jun 7, 2010
filing date -
Mar 21, 2007
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Abstract
Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.
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