Optical apparatus and method for modifying the imaging behavior of such apparatus
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United States of America Patent
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May 1, 2012
Grant Date -
Jul 9, 2009
app pub date -
Jan 21, 2009
filing date -
Jul 24, 2006
priority date (Note) -
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Abstract
The disclosure relates to an optical apparatus including a light source that emits light in the form of light pulses having a pulse frequency, and including at least one optical element. The disclosure also relates to a projection exposure machine including a pulsed light source and a projection objective, and to a method for modifying the imaging behavior of such an apparatus, such as in a projection exposure machine.
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