MEMS anchors

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United States of America Patent

PATENT NO 8169679
APP PUB NO 20100110518A1
SERIAL NO

12606675

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Abstract

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The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.

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Patent Owner(s)

Patent OwnerAddress
SNAPTRACK INC5775 MOREHOUSE DR SAN DIEGO CA 92121

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andersson, Mark B Boston, US 25 442
Steyn, Jasper Lodewyk Winchester, US 58 1980
Wu, Joyce H Somerville, US 19 295

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