US Patent No: 8,173,280
Number of patents in Portfolio can not be more than 2000
Nickel oxide film for bolometer and method for manufacturing thereof, and infrared detector using the same
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May 8, 2012
Issued date -
Oct 29, 2009
filing date -
12/608,657
serial no -
In Force
status
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Abstract
There are provided a nickel oxide film for a bolometer and a manufacturing method thereof, and an infrared detector using the nickel oxide film. The nickel oxide film has properties with a TCR value greater than −3%/° C., a low noise value, and stable and high reproducibility properties. The nickel oxide film is applicable to manufacturing an infrared detector using a nickel oxide film for a bolometer.
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First Claim
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International Classification(s)
Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 5,445,158 Radiation detector probe | 49 | 1991 | |
| 5,325,863 Radiation detector with high thermal stability | 53 | 1992 | |
| 5,653,238 Radiation detector probe | 29 | 1994 | |
| 6,047,205 Radiation detector probe | 22 | 1996 | |
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| 6,219,573 Radiation detector probe | 28 | 1999 | |
| 2006/0062,274 Radiation detector probe | 11 | 2005 | |
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| 7,145,141 Infrared bolometer | 2 | 2004 | |
| 7,744,947 Method of forming carbon nanotube on semiconductor substrate, method of forming semiconductor metal wire using the same, and method of fabricating inductor using the same | 4 | 2006 | |
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| 2005/0186,117 Gas detecting method and gas sensors | 25 | 2004 | |
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| 6,688,731 Piezoelectric thin film element, ink jet recording head using such a piezoelectric thin film element, and their manufacture methods | 8 | 2000 | |
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| 2010/0323,160 ZnO-BASED THIN FILM | 1 | 2008 | |
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| 6,037,590 Polarization-tunable antenna-coupled infrared detector | 4 | 1998 | |
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| 6,310,346 Wavelength-tunable coupled antenna uncooled infrared (IR) sensor | 7 | 1999 | |
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| 6,880,234 Method for thin film NTC thermistor | 2 | 2001 | |
Patent Citation Ranking
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