Etchant composition, patterning conductive layer and manufacturing flat panel, display device using the same

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United States of America Patent

PATENT NO 8173546
APP PUB NO 20110256485A1
SERIAL NO

13167587

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Abstract

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An etchant composition that allows simplification and optimization of semiconductor manufacturing process is presented, along with a method of patterning a conductive layer using the etchant and a method of manufacturing a flat panel display using the etchant. The etchant includes nitric acid, phosphoric acid, acetic acid, and an acetate compound in addition to water.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG DISPLAY CO LTDGYEONGGI DO SOUTH KOREA GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baek, Kui-Jong Daejeon, KR 10 72
Choung, Jong-Hyun Hwaseong-si, KR 69 379
Hong, Sun-Young Yongin-si, KR 39 4222
Kim, Bong-Kyun Incheon, KR 67 528
Lee, Byeong-Jin Yongin-si, KR 56 373
Lee, Ji-Sun Cheonan-si, KR 7 22
Park, Hong-Sick Suwon-si, KR 89 540
Rhee, Tai-Hyung Daejeon, KR 5 17
Song, Yong-Sung Daejeon, KR 5 9

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