Capacitive sensor

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United States of America Patent

PATENT NO 8176782
SERIAL NO

12296554

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A capacitive sensor includes a fixed electrode and a movable electrode that is movably supported by an anchor portion through a beam portion. The fixed electrode and the movable electrode are opposed to each other with a gap interposed therebetween, thereby constituting a detecting unit. A capacitance suitable for a size of the gap is detected to detect a predetermined physical value. At least one of an end of the beam portion connected to the anchor portion and an end of the beam portion connected to the movable electrode is provided with a stress moderating unit that moderates a stress.

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Patent Owner(s)

  • PANASONIC CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoki, Ryo Osaka, JP 10 38
Furukubo, Eiichi Kadoma, JP 8 89
Miyajima, Hisakazu Osaka, JP 9 214
Ohbuchi, Masao Kadoma, JP 1 23
Wakabayashi, Daisuke Osaka, JP 14 70

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