Photonic milling using dynamic beam arrays

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United States of America Patent

PATENT NO 8178818
APP PUB NO 20090242522A1
SERIAL NO

12235294

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Abstract

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A laser processing system includes a beam positioning system to align beam delivery coordinates relative to a workpiece. The beam positioning system generates position data corresponding to the alignment. The system also includes a pulsed laser source and a beamlet generation module to receive a laser pulse from the pulsed laser source. The beamlet generation module generates a beamlet array from the laser pulse. The beamlet array includes a plurality of beamlet pulses. The system further includes a beamlet modulator to selectively modulate the amplitude of each beamlet pulse in the beamlet array, and beamlet delivery optics to focus the modulated beamlet array onto one or more targets at locations on the workpiece corresponding to the position data.

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Patent Owner(s)

Patent OwnerAddress
ELECTRO SCIENTIFIC INDUSTRIES INC13900 NW SCIENCE PARK DRIVE PORTLAND OR 97229

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baird, Brian W Portland, US 38 1001
Bruland, Kelly J Portland, US 28 713
Hainsey, Robert Portland, US 5 164

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