Accessible stress-based electrostatic monitoring of chemical reactions and binding
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United States of America Patent
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May 22, 2012
Grant Date -
Dec 31, 2009
app pub date -
Jun 27, 2008
filing date -
Jun 27, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
A sensor may include a substrate that has a cavity formed in a surface thereof. A diaphragm, having a conductive portion, may be suspended over the cavity, a selective coating may be present on a face of the diaphragm outside of the cavity, and a counterelectrode may be spaced from and in opposition to the diaphragm. The diaphragm may deform upon interaction of the selective coating with an analyte and thereby alter a capacitance of the sensor in a manner indicative of a degree of interaction.
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