Thin film interference filter and bootstrap method for interference filter thin film deposition process control
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United States of America Patent
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May 22, 2012
Grant Date -
Dec 2, 2010
app pub date -
Jun 21, 2010
filing date -
Sep 13, 2005
priority date (Note) -
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Abstract
A thin film interference filter system includes a plurality of stacked films having a determined reflectance; a modeled monitor curve; and a topmost layer configured to exhibit a wavelength corresponding to one of the determined reflectance or the modeled monitor curve. The topmost layer is placed on the plurality of stacked films and can be a low-index film such as silica or a high index film such as niobia.
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