Method of manufacturing a piezoelectric resonator having improved temperature compensation
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United States of America Patent
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May 29, 2012
Grant Date -
Apr 23, 2009
app pub date -
Dec 29, 2008
filing date -
Dec 23, 2004
priority date (Note) -
Expired
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Abstract
A method for manufacturing a piezoelectric resonator, comprising the step of: producing an arrangement comprising a piezoelectric layer having a resonance frequency temperature coefficient of a first sign, a first and a second electrode. The piezoelectric layer is arranged between the first and second electrodes, and a compensation layer is arranged between the first electrode and the piezoelectric layer. The compensation layer has a compensation material having a second resonance frequency temperature coefficient of a second sign opposite to the first one. The producing comprises providing the compensation material with a modification material to increase a conductivity of the compensation layer in a direction between the first electrode and the piezoelectric layer.
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