Acoustic resonator performance enhancement using selective metal etch
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United States of America Patent
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May 29, 2012
Grant Date -
Nov 4, 2010
app pub date -
Jul 19, 2010
filing date -
Dec 22, 2004
priority date (Note) -
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Abstract
An acoustic resonator comprises: a substrate; a first electrode adjacent the substrate; a layer of piezoelectric material adjacent the first electrode; a second electrode adjacent the layer of piezoelectric material; and a passivation layer adjacent the layer of piezoelectric material. The passivation layer includes a recessed feature. Fill material is provided in the recessed feature of the passivation layer.
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