US Patent No: 8,191,217
Number of patents in Portfolio can not be more than 2000
Complimentary metal-insulator-metal (MIM) capacitors and method of manufacture
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Jun 5, 2012
Issued date -
Aug 5, 2009
filing date -
12/535,769
serial no -
In Force
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Abstract
A high density capacitor and low density capacitor simultaneously formed on a single wafer and a method of manufacture is provided. The method includes depositing a bottom plate on a dielectric material; depositing a low-k dielectric on the bottom plate; depositing a high-k dielectric on the low-k dielectric and the bottom plate; depositing a top plate on the high-k dielectric; and etching a portion of the bottom plate and the high-k dielectric to form a first metal-insulator-metal (MIM) capacitor having a dielectric stack with a first thickness and a second MIM capacitor having a dielectric stack with a second thickness different than the first thickness.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 6,885,056 High-k dielectric stack in a MIM capacitor and method for its fabrication | 7 | 2003 | |
| 7,008,841 Semiconductor device having metal-insulator-metal capacitor and method for fabricating the same | 6 | 2004 | |
| 2006/0158,829 Multi-layered dielectric film of microelectronic device and method of manufacturing the same | 2 | 2006 | |
| 2006/0183,280 Metal-insulator-metal capacitors and methods of forming the same | 4 | 2006 | |
| 2007/0202,656 Method of fabricating a semiconductor device | 3 | 2007 | |
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| 6,271,084 Method of fabricating a metal-insulator-metal (MIM), capacitor structure using a damascene process | 55 | 2001 | |
| 2005/0132,549 Method for making metal capacitors with low leakage currents for mixed-signal devices | 17 | 2004 | |
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| 6,677,254 Processes for making a barrier between a dielectric and a conductor and products produced therefrom | 14 | 2001 | |
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| 6,730,573 MIM and metal resistor formation at CU beol using only one extra mask | 23 | 2002 | |
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| 6,998,322 Methods of fabricating high voltage, high temperature capacitor and interconnection structures | 6 | 2003 | |
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| 2009/0200,638 MIM CAPACITOR INTEGRATION | 3 | 2006 | |
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| 2008/0020,540 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE | 5 | 2007 | |
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| 7,312,118 Semiconductor device and method of manufacturing the same | 15 | 2006 | |
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| 2006/0286,734 MIM/MIS structure with praseodymium titanate or praseodymium oxide as insulator material | 2 | 2006 | |
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| 6,919,283 Fabrication of pure and modified Ta2O5 thin film with enhanced properties for microwave communication, dynamic random access memory and integrated electronic applications | 2 | 2003 | |
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