Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions
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United States of America Patent
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Jun 5, 2012
Grant Date -
Jul 10, 2008
app pub date -
Jan 7, 2008
filing date -
Jan 5, 2007
priority date (Note) -
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Abstract
Various methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions are provided. One computer-implemented method includes using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions. The one or more defect-related functions include one or more post-mask, defect-related functions.
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