Method and system for providing a pole for a perpendicular magnetic recording head using a multi-layer hard mask
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United States of America Patent
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Jun 12, 2012
Grant Date -
N/A
app pub date -
Dec 17, 2008
filing date -
Dec 17, 2008
priority date (Note) -
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Abstract
A method and system for providing a PMR pole in a transducer including an intermediate layer are disclosed. A mask including line(s) having side(s) is provided. A hard mask is provided on the mask. Portions of the hard mask reside on the line side(s) and intermediate layer surface. The hard mask includes a wet-etchable layer and a high removal ratio layer on the wet-etchable layer. Part of the hard mask on the side(s) of the line is removed, exposing part of the line. The high removal ratio layer has a low angle removal rate on the line side(s) and a high angle removal rate on the intermediate layer surface. The low angle removal rate is at least four times the high angle removal rate. The line is removed, providing an aperture in the hard mask. A trench is provided in the intermediate layer. A PMR pole is provided.
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