Substrate attracting device and substrate transfer apparatus
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United States of America Patent
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Jun 12, 2012
Grant Date -
Oct 30, 2008
app pub date -
Apr 23, 2008
filing date -
Apr 24, 2007
priority date (Note) -
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Abstract
A substrate attracting device includes an attracting body for attracting and holding a substrate to transfer the substrate. The attracting body includes a first attracting unit for attracting and holding a top surface of the substrate according to Bernoulli principle and a second attracting unit for vacuum-attracting and holding a bottom surface of the substrate.
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