MEMS device and process
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United States of America Patent
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Jun 12, 2012
Grant Date -
Sep 23, 2010
app pub date -
Sep 18, 2008
filing date -
Sep 19, 2007
priority date (Note) -
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Abstract
A MEMS transducer includes a substrate, a membrane layer and a back-plate layer. The membrane layer is supported by the substrate. The back-plate layer is supported by the membrane layer and includes a respective sidewall portion and a respective raised portion. One or more columns, separate from the sidewall portion of the back-plate layer, connect the back-plate layer, the membrane layer and the substrate.
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