Flexible electrostatic actuator
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United States of America Patent
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Jun 12, 2012
Grant Date -
May 29, 2008
app pub date -
Apr 25, 2005
filing date -
Apr 23, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An electrostatic actuator having a base including a first electrode and a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The flexible membrane includes a fixed end connected to the base and a free end opposite the fixed end and spaced apart from the base. The second electrode has at least first and second portions separated by a third portion and in combination defining a first and second step provided in a vicinity of the fixed end.
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